JPS6013713Y2 - 搬送設備 - Google Patents
搬送設備Info
- Publication number
- JPS6013713Y2 JPS6013713Y2 JP12939880U JP12939880U JPS6013713Y2 JP S6013713 Y2 JPS6013713 Y2 JP S6013713Y2 JP 12939880 U JP12939880 U JP 12939880U JP 12939880 U JP12939880 U JP 12939880U JP S6013713 Y2 JPS6013713 Y2 JP S6013713Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- storage section
- object storage
- main body
- conveyed object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Ventilation (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12939880U JPS6013713Y2 (ja) | 1980-09-10 | 1980-09-10 | 搬送設備 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12939880U JPS6013713Y2 (ja) | 1980-09-10 | 1980-09-10 | 搬送設備 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5752359U JPS5752359U (en]) | 1982-03-26 |
JPS6013713Y2 true JPS6013713Y2 (ja) | 1985-05-01 |
Family
ID=29489749
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12939880U Expired JPS6013713Y2 (ja) | 1980-09-10 | 1980-09-10 | 搬送設備 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6013713Y2 (en]) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58161340A (ja) * | 1982-03-19 | 1983-09-24 | Hitachi Ltd | 製品移送装置 |
JPS6197576U (en]) * | 1984-12-01 | 1986-06-23 | ||
JPH0527014Y2 (en]) * | 1985-10-31 | 1993-07-08 |
-
1980
- 1980-09-10 JP JP12939880U patent/JPS6013713Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5752359U (en]) | 1982-03-26 |
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